Improve Surface Temperatures and Thermal Gradients, while Reducing Time Constraints
decrease in ΔT demonstrated (13.8 to 2.3 mK)
stabilization improvement demonstrated

Optimize the Thermal Management of Semiconductor Equipment

The Benefits of Metal Additive Manufacturing

  • Semiconductor DMP Manifold in 3DXpert
  • Design Flexibility

    Additive manufacturing makes it possible to optimally design (e.g., using topology optimization), rapidly iterate, and manufacture wafer tables with complex features, such as cooling channels, that dissipate heat better.

  • a person in protective gear holding a 3D printed part
  • High Quality and Accuracy for Clean Room Environments

    Our metal additive solutions ensure high material quality and part accuracy, producing parts in an inert atmosphere with a steady, ultra-low oxygen level—coupled with proprietary processes for optimal particle cleanliness. This results in metal parts that meet clean room requirements and are fit for use in lithography equipment.

  • wafer tables sitting on a platform
  • Performance and Productivity

    Better thermal management of critical semiconductor equipment components, such as wafer tables, can improve semiconductor equipment accuracy by 1–2 nm and simultaneously improve speed and throughput. An increased machine speed and uptime leads to more wafers processed and higher overall lifecycle value.

    Additive manufacturing also delivers structurally optimized wafer tables with reduced part counts and assemblies. Replacing multipart assemblies with monolithic parts increases reliability, improves manufacturing yield, and reduces labor costs.

Answer Challenges Related to Thermal Efficiency

  • thermal gradients rendered

    Reduce Thermal Gradients

    Changing temperatures and thermal gradients in wafer tables negatively affects the lithography process and system performance, causing distortion and impacting throughput and accuracy. 

  • a hand holding an hourglass

    Improve Time to Market

    Optimizing wafer tables for thermal efficiency and performance with traditional manufacturing methods typically requires multiple design iterations that can negatively affect project timelines.

  • 3 people standing in a facility discussing work

    Lower Cost and Increase Reliability

    Increasing wafer table complexity with traditional manufacturing, such as by introducing weld seams, typically results in rising part costs. This also sacrifices part performance and reliability.

  • 3d systems laserform ti gr5 (a) dmp hydraulic manifold gf post machined alternate

    Wilting Uses Metal Additive Manufacturing to Improve Semiconductor Equipment

    Learn how Netherlands-based manufacturer Wilting brought advanced metal additive manufacturing expertise in house to improve semiconductor equipment performance and productivity.

  • 3D printed parts

    CERN LHCb Advances Particle Detection Capabilities

    CERN used 3D Systems’ metal additive manufacturing technology and expertise to develop and produce reliable, leak-tight custom cool-bars to achieve −40º temperatures within its Large Hadron Collider detector.

More Semiconductor Applications

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  • Application Innovation Group

    Our team can help you solve your most difficult design and production challenges with additive manufacturing solutions. Together we’ll identify your needs, working with you to optimize your designs, prototype, validate and define a manufacturing flow.