Improve Product Performance and Mixing Efficiency, Increase Reliability, and Reduce Manufacturing Costs by Leveraging Direct Metal Printing to Produce with Optimized Form Factors and More Efficient Gas Pathways
20:1
component reduction
100%
leak-proof
3x
more efficient

Reduce Part Count While Improving Gas Conveyance and Mixing Efficiency

A 3D printed Gas Mixer

Metal 3D printed cross section of a gas mixer with active cooling

Conveying caustic gas into a sealed process chamber is typical in wet processing systems such as cleaning and etching semiconductor capital equipment. Therefore, efficient conveyance of gases, whether they need to remain separate or mix, with no leakage, limited flow turbulence, and through minimal apertures in the process chamber, is critical. This involves complex, multi-component gas mixers and feeder assemblies made of corrosive-gas-resistant materials.

This can all be optimized using direct metal 3D printing solutions and semiconductor equipment expertise from 3D Systems. Gas conveyance systems can be designed with fewer components to fit in smaller spaces with higher reliability. In addition, optimized, higher complexity gas mixers can be developed in far less time to deliver more effective mixing, faster. 

The Benefits of Metal Additive Manufacturing

  • Semiconductor Design Flexibility - Gas Conveyance

  • Design Flexibility

    Additive manufacturing makes it possible to optimally design, and rapidly iterate and manufacture gas feeders and mixers within tight spaces, with numerically modeled gas pathways that reliably convey and efficiently mix gases toward the process chamber.

  • Semiconductor Clean Room Environments

  • High Quality and Accuracy for Clean Room Environments

    High material quality, fine part details and accuracy produced in an inert atmosphere with a steady, ultra-low oxygen level—coupled with proprietary processes for optimal particle cleanliness—result in metal parts that meet clean room requirements and are fit for use in semiconductor equipment.

  • Performance and Productivity

    A reduction in gas flow turbulence enables an accurate and even spread of cleaning and etching gases, increasing overall system efficiency and throughput to process more wafers. Additive manufacturing also delivers structurally optimized gas feeders with reduced part counts and assemblies. Replacing multipart assemblies with monolithic parts increases reliability, improves manufacturing yield, and reduces labor costs.

Optimizing Gas Conveyance and Mixing

  • Improve Gas Flow Efficiency - Gas Conveyance

    Improve Gas Flow Efficiency

    Additive manufacturing gives semiconductor equipment engineers unprecedented design flexibility. They are able to unlock novel internal patterns, nozzle shapes, and mixing chambers, thus optimizing gas flow and mixing for maximum performance and efficiency.

  • a technician holding a wafer

    Increase Reliability

    Additive manufacturing delivers structurally optimized gas feeders and mixers with reduced part counts and assemblies. This greatly increases component reliability by eliminating fluid leakage at connections under the highest temperatures and operating pressures for higher component integrity.

  • Semiconductor Gas Mixer with ruler

    Minimize Volume

    Thinner walls and component consolidation deliver leak-tight integrity and enable more efficient functionality in a smaller package size. Produce multi-axis features and trapped volumes with significant ease compared to traditional manufacturing processes.

Resources

  • Semiconductor ebook cover

    Rapidly Adopt and Scale Metal Additive Manufacturing

    In this eBook, you’ll learn how 3D Systems’ decades of experience and expertise helps integrate metal AM to drive performance, productivity, and reliability improvements for semiconductor capital equipment manufacturers and suppliers.

    Get the eBook
  • Silicon Wafers and Microcircuits sitting on a robot arm

    Additive Manufacturing for Semiconductor Capital Equipment

    Discover how 3D Systems’ metal additive manufacturing can give semiconductor capital equipment manufacturers and suppliers the capabilities they need to improve performance, productivity, and reliability.

    Read our Brochure

More Semiconductor Applications

hand holding a dmp manifold fluid flow optimization image alt

Manifold Fluid Flow Optimization
semiconductor wafer table thermal management link

Wafer Table Thermal Management
Semiconductor linear stage cooler with fluid cross section showing heat and cooling

Linear Stage Cooling
A 3D printed Semiconductor Showerhead

Showerhead Optimization
semiconductor vdl focus stack flexure structural optimization image

Flexure and Structural Optimization

Learn More About Gas Conveyor and Mixer Manufacturing Solutions

DMP Factory 350 Duel 3D Printer

DMP Factory 350 and DMP Factory 350 Dual

Scalable, high quality metal AM with integrated powder management

Manufacture metal parts with scalable DMLS with removable build chamber for continuous printing

DMP Factory 500

Robust, high quality metal AM with integrated powder management

LaserForm Ni718 (A) DMP Combustion Chamber

LaserForm Ni718 (A)

Oxidation, corrosion and extremely high-temperature resistant

3D Systems 3DXpert hero image

3DXpert

All-in-One Integrated Software for Industrial Additive Manufacturing

DMP Flex 350 Duel 3D printer

DMP Flex 350, DMP Flex 350 Dual and DMP Flex 350 Triple

Robust, flexible metal 3D printer for rapid part production

3D Systems DMP LaserForm 316L (A) Impeller

LaserForm 316L (A)

Able to be sterilized and highly corrosion resistant.

LaserForm AlSi10MG Heat Exchanger

LaserForm AlSi10Mg (A)

Good mechanical properties and good thermal conductivity

DMP Inspection for QA in Metal AM

DMP Inspection

Minimize secondary inspection in Metal AM with validated automated analysis

DMP Monitoring - real-time metal additive process monitoring

DMP Monitoring

Real-time process monitoring for informed decisions on product quality

a 3D rendering made from Control X software

Geomagic Control X

3D Inspection and Metrology Software

Geomagic Design X reverse engineering and 3D scanning software

Geomagic Design X

Reverse Engineering Software

Talk to an Expert

I consent to receive 3D Systems Communications
Would you like to receive special offers, product updates, and event news from 3D Systems? By clicking "Yes", you agree to receive follow-up communications from 3D Systems or our partners. You can also choose to opt out of communications at any time. Please click here to view our Privacy Policy or click here to manage your Preferences.

  • Application Innovation Group

    Our team can help you solve your most difficult design and production challenges with additive manufacturing solutions. Together we’ll identify your needs, working with you to optimize your designs, prototype, validate and define a manufacturing flow.